During the tour of the SNL’s three clean rooms visitors will see sophisticated optical (interference lithography stations for the fabrication of submicron period gratings, high power UV laser, metrology station for optics shape measurements, sub-nanometer resolution interferometers, etc.), reactive-ion etching (Plasmtherm RIE, new STPS Pegasus DRIE) and mechanical systems (XY-air-bearing stage, environmental enclosure, active vibration isolation, etc.) as well as a scanning electron microscope, all of which support the development of thin-foil x-ray optics and gratings.
Max 6 people, advance sign-up required starting at 1:55 pm in 37-252
Prerequisites: Attendance of two talks preceding the tour (2-2:30pm; 2:30-3:00pm — both in Marlar Lounge 37-252)