Publications related to Fabrication of Critical-Angle Transmission (CAT) Gratings
and Instrument Design of CAT Grating Spectrometers
(Back to Ralf Heilmann's home page or the
IXO/CAT development page)
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Fabrication of Nanoscale, High Throughput, High Aspect Ratio Freestanding Gratings
A. Bruccoleri, P. Mukherjee, R. K. Heilmann, J. Yam, M. L. Schattenburg, and F. DiPiazza
J. Vac. Sci. Technol. B 30, 06FF03 (2012).
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Progress in the Development of Critical-Angle Transmission Gratings
R. K. Heilmann, A. R. Bruccoleri, P. Mukherjee, and M. L. Schattenburg
Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, T. Takahashi, S. S. Murray, and J.-W. A. den Herder (eds.),
Proc. SPIE 8443, 84430W (2012).
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Fabrication Update on Critical-Angle Transmission Gratings for Soft X-Ray Grating Spectrometers
R. K. Heilmann, A. Bruccoleri, P. Mukherjee, J. Yam, and M. L. Schattenburg
Optics for EUV, X-Ray, and Gamma Ray Astronomy V, S. L. O'Dell and G. Pareschi (eds.),
Proc. SPIE 8147, 81471L (2011).
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Diffraction Efficiency of 200 nm Period Critical-Angle Transmission Gratings in the Soft X-Ray and Extreme Ultraviolet Wavelength Bands
R. K. Heilmann, M. Ahn, A. Bruccoleri, C.-H. Chang, E. M. Gullikson, P. Mukherjee, and M. L. Schattenburg
Appl. Opt. 50, 1364-1373 (2011).
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Plasma Etch Fabrication of 60:1 Aspect Ratio Silicon Nanogratings with 200 nm Pitch
P. Mukherjee, A. Bruccoleri, R. K. Heilmann, M. L. Schattenburg, A. F. Kaplan, and L. J. Guo
J. Vac. Sci. Technol. B 28, C6P70-5 (2010).
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Critical-Angle Transmission Grating Spectrometer for High-Resolution Soft X-Ray Spectroscopy on the International X-Ray Observatory
R. K. Heilmann, J. E. Davis, D. Dewey, M. W. Bautz, R. Foster, A. Bruccoleri, P. Mukherjee, D. Robinson, D. P. Huenemoerder, H. L. Marshall, M. L. Schattenburg, N. S. Schulz, L. J. Guo, A. F. Kaplan, and R. B. Schweikart
Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray, M. Arnaud, S. S. Murray, T. Takahashi (eds.),
Proc. SPIE 7732, 77321J (2010).
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Development of a Critical-Angle Transmission Grating Spectrometer for the International X-Ray Observatory
R. K. Heilmann, M. Ahn, M. W. Bautz, R. Foster, D. P. Huenemoerder, H. L. Marshall, P. Mukherjee, M. L. Schattenburg, N. S. Schulz, and M. Smith
Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV, S. L. O'Dell and G. Pareschi (eds.),
Proc. SPIE 7437, 74370G (2009).
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Fabrication of 200 nm-Period Blazed Transmission Gratings on Silicon-on-Insulator Wafers
M. Ahn, R. K. Heilmann, and M. L. Schattenburg
J. Vac. Sci. Technol. B 26, 2179-2182 (2008).
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Nanomirror Array for High-Efficiency Soft X-Ray Spectroscopy (Invited)
R. K. Heilmann, M. Ahn, and M. L. Schattenburg
SPIE Newsroom, doi: 10.1117/2.1200808.1235 (Aug. 14, 2008).
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Fabrication and Performance of Blazed Transmission Gratings for X-Ray Astronomy
R. K. Heilmann, M. Ahn, and M. L. Schattenburg
Space Telescopes and Instrumentation 2008: Ultraviolet to Gamma Ray, M. J. L. Turner and K. A. Flanagan (eds.),
Proc. SPIE 7011, 701106 (2008).
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Fabrication of 50 nm-Period Gratings with Multilevel Interference Lithography
C.-H. Chang, Y. Zhao, R. K. Heilmann, and M. L. Schattenburg
Opt. Lett. 33, 1572 (2008).
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Blazed High-Efficiency X-Ray Diffraction via Transmission through Arrays of Nanometer-Scale Mirrors
R. K. Heilmann, M. Ahn, E. M. Gullikson, and M. L. Schattenburg
Opt. Express 16, 8658 (2008).
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Spectrometer Concept and Design for X-Ray Astronomy Using a Blazed Transmission Grating
K. Flanagan, M. Ahn, J. Davis, R. K. Heilmann, D. Huenemoerder, A. Levine, H. Marshall, G. Prigozhin, A. Rasmussen, G. Ricker, M. L. Schattenburg, N. Schulz, and Y. Zhao
Optics for EUV, X-Ray, and Gamma-Ray Astronomy III, S. L. O'Dell and G. Pareschi (eds.),
Proc. SPIE 6688, 66880Y (2007).
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Fabrication of Ultrahigh Aspect Ratio Freestanding Gratings on Silicon-on-Insulator Wafers
M. Ahn, R. K. Heilmann, and M. L. Schattenburg
J. Vac. Sci. Technol. B 25, 2593 (2007).
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R. K. Heilmann, C. G. Chen, P. T. Konkola, and M. L. Schattenburg
Dimensional Metrology for Nanometer-Scale Science and Engineering:
Towards Sub-Nanometer Accurate Encoders (Invited)
Nanotechnology 15, S504 (2004).
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Nanometer-Level Repeatable Metrology Using the Nanoruler
P. T. Konkola, C. G. Chen, R. K. Heilmann, C. Joo, J. C. Montoya,
C.-H. Chang, and M. L. Schattenburg
J. Vac. Sci. Technol. B 21, 3097 (2003).
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Hybrid transmission-reflection grating - US patent 7492989
R. K. Heilmann and M. L. Schattenburg
February 17, 2009.
Instrument Heritage
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The Chandra High-Energy Transmission Grating: Design, Fabrication, Ground Calibration, and 5 Years in Flight
Claude R. Canizares, John E. Davis, Daniel Dewey, Kathryn A. Flanagan,
Eugene B. Galton, David P. Huenemoerder, Kazunori Ishibashi, Thomas H. Markert,
Herman L. Marshall, Michael McGuirk, Mark L. Schattenburg, Norbert S. Schulz,
Henry I. Smith, and Michael Wise
Publications of the Astronomical Society of the Pacific 117, 1144–1171 (2005).
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Improved x-ray CCD response at very low x-ray energies
M. W. Bautz, S. E. Kissel, B. J. LaMarr, and G. Y. Prigozhin
Proc. SPIE 6266, 62662P 1-8 (2006).
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Progress in x-ray CCD sensor performance for the Astro-E2 x-ray imaging spectrometer
Mark W. Bautz, Steven E. Kissel, Gregory Y. Prigozhin, Beverly LaMarr, Barry E. Burke, and James A. Gregory
Proc. SPIE 5501, 111-122 (2004).
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Advanced CCD imaging spectrometer (ACIS) instrument on the Chandra X-ray Observatory
Gordon P. Garmire, Mark W. Bautz, Peter G. Ford, John A. Nousek, and George R. Ricker, Jr.
Proc. SPIE 4851, 28-44 (2003).
Last modified by ralf at space mit edu on Jan. 8, 2010
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